
Zhongzheng Semiconductor
Leading SiC trench etching equipment and process solutions
Leading domestic SiC trench etching and process delivery


Talent · Innovation · Enthusiasm · Team · Quality
先进等离子体技术推动更精细的微观加工世界
company profile
Company Introduction
Zhongzhen Semiconductor is a high-tech company focusing on front-end wafer equipment
核心产品是前道工艺“等离子体干法刻蚀设备(Plasma Dry Etch)。 团队在技术和经验上非常全面,涵盖设备、制程工艺甚至器件设计等多个环节,并且会与产业生态内的合作伙伴进行联合研发,期望尽早推出卓越的刻蚀设备产品和成熟的工艺解决方案,协助客户解决关键工艺,提升产品价值。
我们的产品主要应用于特色工艺的半导体晶圆制造,例如第三代半导体(SiC、GaN)、Mems微机电系统、特色材料(AlN&LNO&玻璃基)、先进封装场景以及 Dicing切割和表面处理等过程工艺,希望能够为这些快速发展技术领域提供 工艺设备的支持。中锃的核心特色是,在先进的刻蚀机台之外,中锃半导体也向客户提供 “关键工艺解决方案”,以期望提供更丰富的客户价值。
Special technology
SiC
Compound Semiconductors
异质集成
Wafer processing



Equipment & Special Process Solutions
EQUIPMENT
&TECHNOLOGY
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Silicon Carbide & Trench Etching
sI
&Trench Etch
As a third-generation semiconductor material, silicon carbide (SiC) has shown strong market potential in multiple high-tech fields with its excellent electron mobility, high-temperature stability and high-voltage resistance. It is widely used in high-end fields such as electric vehicles, solar inverters, 5G communications and smart grids. With its excellent high-temperature, high-voltage and high-frequency performance, SiC is gradually replacing traditional silicon materials and promoting the development of electronic devices towards higher efficiency and smaller size. With the decline in manufacturing costs and the expansion of production capacity, its market application is expected to expand further.
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2018
development path
DEVELOPMENT
HISTORY
More than 40 years of unique experience spanning factories, equipment technology and chip design
1982
1990
1997
2006
2012
2017
2015
2019
2021
2023
Formerly known as "Aika Electronics Co., Ltd." 3um CMOS process to build a 4-inch 100-level wafer factory
After the acquisition by Taiwan capital, it was renamed "Huazhi (Hong Kong) Co., Ltd." and developed CMOS 1.0um process for memory IC
获得摩托罗拉/安森美半导体的汽车供货商资格生产TMOS 器件;更获车规QS-9000系统证书
The company's shareholder structure was reorganized and the company was transformed into a fabless technology company, renamed "Huazhi Technology (International) Co., Ltd."
Successfully developed super junction MOSFET technology, with cumulative production exceeding 30 million units in 2021.
APS was established and Huada invested to successfully spin off the silicon carbide business, focusing on silicon carbide power gas components
In the same year, we successfully developed the first 6-inch SiC JBS Diode wafer in Greater China
Successfully developed GaN eHEMT 15A, 650V device
Plasma Etching Equipment RIE Project received funding from the Hong Kong SAR Government (HKD 6.5 million)
Vitelic and the Hong Kong Applied Science and Technology Research Institute jointly established two joint laboratories, including the third semiconductor power and energy laboratory.
Successfully completed the plasma etching machine RIE project funded by the government research fund, manufactured a total of three devices, and the first one will be officially delivered to the Hong Kong University of Science and Technology HKUST in 2021
Plasma Etching Machine RIE Project successfully financed,
In October 2023, Zhongzhen Semiconductor (Shenzhen) Co., Ltd. was established in Shenzhen Hetao District

News Center
News Center

Zhongzheng Semiconductor officially opened for business, promoting scientific and technological cooperation in the semiconductor field
On March 15, the opening ceremony and unveiling ceremony of Zhongzhen Semiconductor (Shenzhen) Co., Ltd. was successfully held at the "Hetao Shenzhen-Hong Kong Innovation Cooperation Zone-Hong Kong Science Park Shenzhen Branch". The company was established in October 2023 and completed an angel round of financing of tens of millions of yuan, jointly invested by Guoke BOE, Guohe Yaoneng, and Wangzhong Capital. After this round of financing, Zhongzhen Semiconductor will continue to attract high-end technical talents and increase investment in the research and development of prototype equipment and key processes.


Zhongzhen Semiconductor was listed in "I am in the Greater Bay Area"
Hetao Application Innovation Technology Salon
Mr. Tan Zhiming participated in the recording of the program "I am in the Greater Bay Area - Chasing the Dream of Semiconductor". This episode will deeply explore the development history of Zhongzhen Semiconductor in the Guangdong-Hong Kong-Macao Greater Bay Area and Mr. Tan Zhiming's rich experience in the semiconductor industry for 40 years.
The Hetao Application Innovation Technology Series Salon Event (Phase II) is themed "Application of Gallium Nitride in Digital Power Supply", focusing on exploring the latest progress and application prospects of gallium nitride (GaN) technology in improving the performance and efficiency of digital power supply.
